JPH0180934U - - Google Patents

Info

Publication number
JPH0180934U
JPH0180934U JP1987176809U JP17680987U JPH0180934U JP H0180934 U JPH0180934 U JP H0180934U JP 1987176809 U JP1987176809 U JP 1987176809U JP 17680987 U JP17680987 U JP 17680987U JP H0180934 U JPH0180934 U JP H0180934U
Authority
JP
Japan
Prior art keywords
section
cassette
processing
surface treatment
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987176809U
Other languages
English (en)
Japanese (ja)
Other versions
JP2544056Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17680987U priority Critical patent/JP2544056Y2/ja
Publication of JPH0180934U publication Critical patent/JPH0180934U/ja
Application granted granted Critical
Publication of JP2544056Y2 publication Critical patent/JP2544056Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP17680987U 1987-11-19 1987-11-19 ウエハの表面処理装置 Expired - Lifetime JP2544056Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17680987U JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17680987U JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Publications (2)

Publication Number Publication Date
JPH0180934U true JPH0180934U (en]) 1989-05-30
JP2544056Y2 JP2544056Y2 (ja) 1997-08-13

Family

ID=31468512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17680987U Expired - Lifetime JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Country Status (1)

Country Link
JP (1) JP2544056Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000003894A (ja) * 1999-05-10 2000-01-07 Tokyo Electron Ltd 洗浄装置及びその方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110299313B (zh) * 2019-07-04 2022-09-16 北京北方华创微电子装备有限公司 清洗装置和清洗方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000003894A (ja) * 1999-05-10 2000-01-07 Tokyo Electron Ltd 洗浄装置及びその方法

Also Published As

Publication number Publication date
JP2544056Y2 (ja) 1997-08-13

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